Trigon™ BPG552 Bayard-Alpert Pirani DualGauge

For applications that require a measurement range from UHV (5 x10-10) down to ATM (1000 mbar) theTrigonTM family contents the dual technology BPG552 gauge.

BPG552 consists out of an Bayard-Alpert Hot Ionization sensor element as well as out of a classical, robust and reliable Pirani sensor element. Besides of extending the usable process to base pressure measuring range of BPG552, the integrated Pirani also automatically switches on/ off the Bayard-Alpert high vacuum sensing element, depending on unhealthy pressure changes during the process.

Combining technologies reduces the complexity of installation, setup, and integration, thus reducing cost and valuable tool space.​

The supported Bayard-Alpert dual filament offers superior accuracy, repeatability and longevity. The removable calibration data chip, that comes along with the easy to install BPG552 spare sensor, to secure a seamless accurate process measurement, enables a higher bakeability of the sensor unit.​ BPG552 is available with analog output or EtherCAT interface option. Both enable easiest system integration.​

The TrigonTM BPG552 can also be operated in conjunction with the INFICON Vacuum Gauge Controller series VGC501, VGC502, VGC503 or with other control devices.​

Advantages at a glance:

  • 2 sensing elements for a wide measurement range, cost reduction & space savingness
  • 2 filaments for Bayard-Alpert system
  • Pirani interlock protection to avoid premature filament burnout
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Galvanic isolated electronics to avoid electric stray current
  • Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
  • Extended bakeability due to removable calibration data chips
  • Set point relays
  • Bright & big OLED display (90° rotatable) with user interface
  • Analog output, RS232C serial interface, EtherCAT®
  • Usable in conjunction with VGC50x Controller series
  • Backwards compatible to BPG402
  • RoHS compliance

 

Trigon™ BPG552 Bayard-Alpert Pirani DualGauge

Company

INFICON

INFICON AG