Trigon™ BCG552 Bayard-Alpert Pirani Capacitance Diaphragm TripleGauge®

The TripleGauge® BCG552 combines 3 vacuum sensing elements in one sensor flange. This flagship of the new Trigon™ family offers extreme wide measurement range from UHV (5 x10-10) down to ATM (1500 mbar).

With its additional ATM sensor BCG552 is predestinated to use for differential pressure  measurement and the use as vacuum switch in several applications.​ BCG552 consists out of an Bayard-Alpert Hot Ionization sensor, a classical, robust and reliable Pirani sensor element and a miniaturized capacitance diaphragm gauge on vacuum side. A Piezo sensor on ATM side completes the BCG552. Combining technologies reduces the complexity of installation, setup, and integration, thus reducing cost and valuable tool space.

The supported Bayard-Alpert dual filament offers superior accuracy,repeatability and longevity in the UHV and HV range, while the miniaturized Capacitance diaphragm gauge is superior accurate in the ATM range and gas type independent.

The BCG552 is available with analog output or EtherCAT interface option. Both enable easiest system integration. The TrigonTM BCG552 TripleGauge® can also be operated in conjunction with the INFICON Vacuum Gauge Controller series VGC501, VGC502, VGC503 or with other control devices.

Advantages at a glance:

• 3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savingness
• 2 filaments for Bayard-Alpert system
• Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures.
• Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes
• Automatic high vacuum Pirani adjustment reduces operator interventions
• Galvanic isolated electronics to avoid electric stray current
• Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
• Set point relays
• Bright & big OLED display (90° rotateable) with user interface
• Analog output, RS232C serial interface, EtherCAT®
• Usable in conjunction with VGC50x Controller series
• Backwards compatible to TripleGauge® BCG450
• RoHS compliance