WaferPath

WaferPath manufactures high quality, cost effective semiconductor wafer handling robots. Focused on software compatibility with its wafer handling atmospheric robots, WaferPath products provide fabrication facility operators and OEM tool builders new design alternatives. Built with modern electronic and mechanical components while retaining a compatible control language, WaferPath products easily fit into new designs or prevent the decommissioning of current tools. Innovations like advanced monitoring of the robot enhance integration into the modern production environment, enabling reliable operation well into the future. Wafer sizes from 75mm to 200mm and 300mm can be accommodated.