PC-Control: Beckhoff technology controls blue laser light

EtherCAT ensures maximum precision in lithography system

Kleo Halbleitertechnik GmbH, based in Tettnang, Germany, produces state-of-the-art lithography systems for masks used in the production of LCD screens. The systems create tiny structures using shortwave, blue laser light. Artec Engineering GmbH based in Baienfurt, Germany, dealt with automation of the high-precision processes using Beckhoff control technology.

  描述 语言 类别 日期 大小 版本 状态
members-no PC-Control: Beckhoff technology controls blue laser light DE PDF 2008年9月1日  
members-no PC-Control: Beckhoff technology controls blue laser light EN  PDF  2008年9月1日  0,17 MB    
members-no PC-Control: Beckhoff-Technologie steuert blaues Laserlicht DE  PDF  2008年9月1日  0,17 MB