PC-Control: Beckhoff technology controls blue laser light
EtherCAT ensures maximum precision in lithography system
Kleo Halbleitertechnik GmbH, based in Tettnang, Germany, produces state-of-the-art lithography systems for masks used in the production of LCD screens. The systems create tiny structures using shortwave, blue laser light. Artec Engineering GmbH based in Baienfurt, Germany, dealt with automation of the high-precision processes using Beckhoff control technology.
| Description | Language | Type | Date | Size | Ver. | Status | |
|---|---|---|---|---|---|---|---|
| PC-Control: Beckhoff technology controls blue laser light | EN | Sep 01, 2008 | 0,17 MB | ||||
| PC-Control: Beckhoff-Technologie steuert blaues Laserlicht | DE | Sep 01, 2008 | 0,17 MB |