Edge - CDG045D2 & CDG100D2 High Precision Vacuum Gauge

The INFICON Edge CDG045D2 & CDG100D2 Capacitance Diaphragm Gauge is a high accurate vacuum measurement instrument designed for harsh manufacturing environments. The proven temperature controlled corrosion resistant ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. The Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process byproducts. Advanced electronics offer the user a wide range of suitable filters for all applications and the option of an EtherCAT fieldbus interface. The INFICON Edge CDG045D2 & CDG100D2, with it’s innovative heating concept is the smallest and most accurate vacuum measurement instrument of it's kind.

ADVANTAGES AT A GLANCE

• Low tool space required
• Smallest instrument of it’s class
• Flexible integration
• EtherCAT fieldbus
• Long lifetime
• Proven ceramic sensor
• High precision measurement
• 80ppm / year full scale stabilty

TYPICAL APPLICATIONS

• PVD, CVD, Etch
• Quality control, reference vacuum
• General high temperature vacuum applications
• Load lock
• Oxidation
• Analytical