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ETG.5003 Semiconductor Device Profile

The ETG.5003 Semiconductor Device Profile series consists of the following parts:

  • Part 1: Common Device Profile
    The Common Device Profile (CDP) specifies requirements applicable to all devices described in the Specific Device Profiles. Furthermore, it describes features and functionalities which shall be further defined in the Specific Device Profiles.
  • Part 2xxx: Specific Device Profiles
    The Specific Device Profiles (SDP) are based on Part 1 (CDP) and define the data structure of the specific devices. For a complete specification of a device used in the semiconductor manufacturing industry an SDP shall be read complementary with the CDP.
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You may not copy, distribute or “mirror” these files or printed version of these documents, or any part of it, without permission in writing from the ETG (EtherCAT Technology Group).

  Description Language Type Date Size Ver. Status
Members onlymembers-yes ETG.5003 Semiconductor Device Profile EN Mar 28, 2022 Release 
Members onlymembers-yes ETG.5003.0000 i Semiconductor Device Profile Implementation Guideline EN  PDF  Oct 10, 2023  0,27 MB 1.0.0  Release 
Members onlymembers-yes ETG.5003.0000d Specific Device Profile (SDP) Design Guideline EN  ZIP  Oct 09, 2024  2,41 MB 1.0.5  Release 
Members onlymembers-yes ETG.5003.0002 Firmware Update EN  PDF  May 05, 2021  0,23 MB 1.0.1  Release 
Members onlymembers-yes ETG.5003.1 Common Device Profile (CDP) incl. OD EN  ZIP  Oct 09, 2024  0,61 MB 1.2.0 (OD 3.3.0)  Release 
Members onlymembers-yes ETG.5003.2000 Abatement and Sub Fab Systems incl. OD EN  ZIP  Mar 28, 2022  0,36 MB 1.1.0 (OD 1.3.0)  Release 
Members onlymembers-yes ETG.5003.201x DC & RF Power Generator EN  ZIP  Mar 28, 2022  0,83 MB 1.1.0 (OD 1.3.0)  Release 
Members onlymembers-yes ETG.5003.202x Mass Flow Controller (MFC) incl. OD EN  ZIP  Mar 28, 2022  1,25 MB 1.2.0 (OD 1.3.0)  Release 
Members onlymembers-yes ETG.5003.2029 Liquid Flow Controller (LFC) + TF-4829 EN  ZIP  Oct 09, 2024  0,70 MB 1.2.0.5 (OD 1.3.4 + TF 0.0.6)  Draft for Review 
Members onlymembers-yes ETG.5003.2030 Process Control Valve EN  PDF  Apr 10, 2014  7,21 MB 1.0.0  Release 
Members onlymembers-yes ETG.5003.2040 RF Match incl. OD EN  ZIP  Mar 28, 2022  0,44 MB 1.1.0 (OD 1.3.0)  Release 
Members onlymembers-yes ETG.5003.2050 Roughing Pump incl. OD EN  ZIP  Mar 28, 2022  0,43 MB 1.1.0 (OD 1.3.0)  Release 
Members onlymembers-yes ETG.5003.2060 Temperature Controller incl. OD EN  ZIP  Mar 28, 2022  0,51 MB 1.2.0 (OD 1.3.0)  Release 
Members onlymembers-yes ETG.5003.2061 Temperature Sensor incl. OD + TF-4861 EN  ZIP  Oct 23, 2024  0,56 MB 1.0.0 (OD 1.0.0)  Release 
Members onlymembers-yes ETG.5003.2070 Turbo Pump incl. OD EN  ZIP  Mar 28, 2022  0,35 MB 1.1.0 (OD 1.3.0)  Release 
Members onlymembers-yes ETG.5003.2080 Vacuum Pressure Gauge incl. OD + TF-4880 EN  ZIP  Oct 09, 2024  0,90 MB 1.3.1 (OD 2.1.0 + TF 2.2.0)  Release 
Members onlymembers-yes ETG.5003.2090 VI Probe incl. OD + TF EN  ZIP  Oct 09, 2024  0,69 MB 1.0.0 (OD 1.0.0 + TF 1.0.0)  Release 
Members onlymembers-yes ETG.5003.3000 Chiller incl. OD EN  ZIP  Mar 28, 2022  0,40 MB 1.1.0 (OD 1.1.0)  Release 
Members onlymembers-yes ETG.5003.3010: Cryogenic Vacuum System (CVS) incl. OD EN  ZIP  Dec 06, 2022  0,68 MB 1.0.0  Release 
Members onlymembers-yes ETG.5003.3030 Process Control Valve compact (PCVc) incl. OD + TF-4930 EN  ZIP  Oct 09, 2024  0,73 MB 1.0.0 (OD 1.0.0 + TF 1.0.0)  Release 
Members onlymembers-yes ETG.5003 Comment Form EN  DOC  Jul 11, 2018  0,02 MB