ETG.5003 Semiconductor Device Profile
The ETG.5003 Semiconductor Device Profile series consists of the following parts:
- Part 1: Common Device Profile
The Common Device Profile (CDP) specifies requirements applicable to all devices described in the Specific Device Profiles. Furthermore, it describes features and functionalities which shall be further defined in the Specific Device Profiles. - Part 2xxx: Specific Device Profiles
The Specific Device Profiles (SDP) are based on Part 1 (CDP) and define the data structure of the specific devices. For a complete specification of a device used in the semiconductor manufacturing industry an SDP shall be read complementary with the CDP.
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| Name | Sprache | Typ | Datum | Größe | Ver. | Status | |
|---|---|---|---|---|---|---|---|
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ETG.5003.0000 i Semiconductor Device Profile Implementation Guideline | EN | Oct 10, 2023 | 0,27 MB | 1.0.0 | Release | |
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ETG.5003.0000d Specific Device Profile (SDP) Design Guideline | EN | ZIP | Oct 09, 2024 | 2,41 MB | 1.0.5 | Release |
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ETG.5003.0002 Firmware Update | EN | May 05, 2021 | 0,23 MB | 1.0.1 | Release | |
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ETG.5003.1 Common Device Profile (CDP) incl. OD | EN | ZIP | Oct 09, 2024 | 0,61 MB | 1.2.0 (OD 3.3.0) | Release |
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ETG.5003.2000 Abatement and Sub Fab Systems incl. OD | EN | ZIP | Mar 28, 2022 | 0,36 MB | 1.1.0 (OD 1.3.0) | Release |
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ETG.5003.201x DC & RF Power Generator | EN | ZIP | Mar 28, 2022 | 0,83 MB | 1.1.0 (OD 1.3.0) | Release |
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ETG.5003.202x Mass Flow Controller (MFC) incl. OD | EN | ZIP | Mar 28, 2022 | 1,25 MB | 1.2.0 (OD 1.3.0) | Release |
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ETG.5003.2029 Liquid Flow Controller (LFC) + TF-4829 | EN | ZIP | Oct 09, 2024 | 0,70 MB | 1.2.0.5 (OD 1.3.4 + TF 0.0.6) | Draft for Review |
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ETG.5003.2030 Process Control Valve | EN | Apr 10, 2014 | 7,21 MB | 1.0.0 | Release | |
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ETG.5003.2040 RF Match incl. OD | EN | ZIP | Mar 28, 2022 | 0,44 MB | 1.1.0 (OD 1.3.0) | Release |
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ETG.5003.2050 Roughing Pump incl. OD | EN | ZIP | Mar 28, 2022 | 0,43 MB | 1.1.0 (OD 1.3.0) | Release |
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ETG.5003.2060 Temperature Controller incl. OD | EN | ZIP | Mar 28, 2022 | 0,51 MB | 1.2.0 (OD 1.3.0) | Release |
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ETG.5003.2061 Temperature Sensor incl. OD + TF-4861 | EN | ZIP | Oct 23, 2024 | 0,56 MB | 1.0.0 (OD 1.0.0) | Release |
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ETG.5003.2070 Turbo Pump incl. OD | EN | ZIP | Mar 28, 2022 | 0,35 MB | 1.1.0 (OD 1.3.0) | Release |
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ETG.5003.2080 Vacuum Pressure Gauge incl. OD + TF-4880 | EN | ZIP | Oct 09, 2024 | 0,90 MB | 1.3.1 (OD 2.1.0 + TF 2.2.0) | Release |
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ETG.5003.2090 VI Probe incl. OD + TF | EN | ZIP | Oct 09, 2024 | 0,69 MB | 1.0.0 (OD 1.0.0 + TF 1.0.0) | Release |
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ETG.5003.3000 Chiller incl. OD | EN | ZIP | Mar 28, 2022 | 0,40 MB | 1.1.0 (OD 1.1.0) | Release |
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ETG.5003.3010: Cryogenic Vacuum System (CVS) incl. OD | EN | ZIP | Dec 06, 2022 | 0,68 MB | 1.0.0 | Release |
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ETG.5003.3030 Process Control Valve compact (PCVc) incl. OD + TF-4930 | EN | ZIP | Oct 09, 2024 | 0,73 MB | 1.0.0 (OD 1.0.0 + TF 1.0.0) | Release |
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ETG.5003 Comment Form | EN | DOC | Jul 11, 2018 | 0,02 MB |